Check the science and engineering of microelectronic fabrication pdf. Silicon Processing for the VLSI Era Vol 1. The properties such as resistivity lithography process compatibility melting point thermal expansion coefficient diffusivity in an insulator adhesion to the insulator and interatomic distances stress of the metal must be considered when selecting an appropriate interconnect material. The Science and Engineering of Microelectronic Fabrication. Read also microelectronic and the science and engineering of microelectronic fabrication pdf 27The Science and Engineering of Microelectronic Fabrication Oxford University Press 2001.
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Last updated 122706. The science and engineering of microelectronic fabrication by Stephen A. 1The Science and Engineering of Microelectronic Fabrication. Introduction to Microelectronic Fabrication 2001 2nd ed S. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology Finland. 9780195136050 By Cram101 Textbook Reviews 2011.
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